RTP Solutions Korea

Mattson RTP _ Refurbish, Set-up and Modification

Rapid Thermal Annealing Equipment.

We handle used mattson RTP system as below.

AST/Steag/Mattson 2800, 2900(200mm)

AST/Steag/Mattson 3000, 3000 Plus(200mm&300mm)

Helios

Repair Service

Rorze Robot(RR711, RR713, RR717)

PMC(Process machine controller)

Sequencer

RTP Parts

IPC upgrade

Quartz Tube

Robot Endeffector

AST2900 Quartz tube
Quartz tube
Endeffector for rorze and equip robot
Endeffector for 2800,2900

We provide professional service and support for Mattson RTP systems.