We set up SECS GEM communication on shs2800 system.
It was 6inch fab and they didn't use FA before.
Their OS and SHSp versions are lots of kind such as 1.6.0, 1.1.4, 1.0.1 and DOS.
We upgraded SW version and made system use SEC GEM communication.
We set up SECS GEM communication on shs2800 system.
It was 6inch fab and they didn't use FA before.
Their OS and SHSp versions are lots of kind such as 1.6.0, 1.1.4, 1.0.1 and DOS.
We upgraded SW version and made system use SEC GEM communication.
Edge guard ring(Slip Guard ring) for shs2900, shs3000(200mm)
Part number : 47800116
Edge guard ring(Slip Guard ring) for shs2900, shs3000(200mm)
6 pieces are 1 set.
Complete to manufacture and get qualification as a 2nd source.
We also provide edge ring for shs2800 system.
We provide repair sevice for wafer aligner on AG8108, AG8800
Part number : 4900-0006-25 AG ASSOCIATES
Model Number : 001-0080-10 Brooks Automation
SHS2800 Pyrometer Repair service
Part number :17000164
Most of symptoms are fail to read temperature or unstable temperature control.
We clear all faulty syptoms.
This part used in mattson steag rtp 2800 system.
After replace pyrometer, you must perform TC calibration for correct temperature.
Repair time is 2 weeks.
Rebuild Door mechanism for mattson helios rtp system.
As time going on, the alignment changes a bit and sensor is easy to fail.
Sometimes press plate makes some leak.
We completed Novellus Concept 2 Altus installatoin at China Fab.
We're refurbishing and midification shs3000(ast3000)
300mm 2 Foup system -> 200mm SMIF system
Install new sequencer(3001474_B, MES 1.19.1)
Remove External UPS option, External HDD
Replace water flow sensor, lamps and pyrometers.
Modification gas box to match end user's config.
Modification on EILC and ripple rack.
We cleared rorze robot problem in ast3000.
Rorze robot connected Com2 on sequencer with RS232.
End user tried to initialize rorze robot but fail. They replaced rorze robot and its controller but syptoms was same.
We cleared it.
RR713
Edge ring segment 300mm Helios
1011151 4ea, 1011152 2ea – 1set
IR lamps are on stock(10pcs only). 11100077.
Sold out
We can also provide second source lamp.