Author Archives: RTPS

About RTPS

We provide professional service and support for Mattson RTP systems. Please e-mail us for more information. Thank you~

1011151 4ea, 1011152 2ea – 1set

edge ring

Side lamps are on stock. 11100077.

side lamp

side lamp 11100077

We can also provide second source lamp.

This IO board is for mattson RTP system.

This board is for IPC in ast2800,2900

This board is for MMC in Helios

Mattson part number : 17002041

Edge guard ring for 150mm wafer

BACK RADIANT SILICON RING

FOR 150MM WAFER WITH HOT LINER

Part number : 47800019

Condition : New

This part is for ast2800 system with hot liner for 150mm

Used Ripple pyrometer for ast2900,3000

Pyrometer Ripple wafer : 17000531

Pyrometer Ripple lamp : 17000532

These pyrometer for mattson ast2900, ast3000 and ripple upgraded 2800 system.