Author Archives: RTPS

About RTPS

We provide professional service and support for Mattson RTP systems. Please e-mail us for more information. Thank you~

APCI-3120-16-8

This IO board is for mattson RTP system.

This board is for IPC in ast2800,2900

This board is for MMC in Helios

Mattson part number : 17002041

 

 

Edge guard ring 150mm

Edge guard ring for 150mm wafer

BACK RADIANT SILICON RING

FOR 150MM WAFER WITH HOT LINER

Part number : 47800019

Condition : New

This part is for ast2800 system with hot liner for 150mm

 

We provide professional service and support for Mattson Steag RTP systems. 

Please e-mail us for more information.

sammy_lee@rtps.kr

Pyrometer

Used Ripple pyrometer for ast2900,3000

 

Pyrometer Ripple wafer : 17000531

Pyrometer Ripple lamp  : 17000532

These pyrometer for mattson ast2900, ast3000 and ripple upgraded 2800 system.

 

We provide professional service and support for Mattson Steag RTP systems. 

Please e-mail us for more information.

sammy_lee@rtps.kr