Author Archives: RTPS

About RTPS

We provide professional service and support for Mattson RTP systems. Please e-mail us for more information. Thank you~

Refurbish and modification ast3000

We're refurbishing and midification ast3000

300mm 2 Foup system -> 200mm SMIF system

Install new sequencer(3001474_B, MES 1.19.1)

Remove External UPS option, External HDD

Replace water flow sensor, lamps and pyrometers.

Modification gas box to match end user's config.

 

Clear rorze robot problem in ast3000

We cleared rorze robot problrm in ast3000.

Rorze robot connected Com2 on sequencer with RS232.

End user tried to initialize rorze robot but fail. They replaced rorze robot and its controller but syptoms was same.

We cleared it.

RR713

RR713

 

Pyrometer

Used Ripple pyrometer for ast2900,3000

 

Pyrometer Ripple wafer : 17000531

Pyrometer Ripple lamp  : 17000532

These pyrometer for mattson ast2900, ast3000 and ripple upgraded 2800 system.

 

We provide professional service and support for Mattson Steag RTP systems. 

Please e-mail us for more information.

sammy_lee@rtps.kr

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