We're refurbishing and midification ast3000
300mm 2 Foup system -> 200mm SMIF system
Install new sequencer(3001474_B, MES 1.19.1)
Remove External UPS option, External HDD
Replace water flow sensor, lamps and pyrometers.
Modification gas box to match end user's config.
We cleared rorze robot problrm in ast3000.
Rorze robot connected Com2 on sequencer with RS232.
End user tried to initialize rorze robot but fail. They replaced rorze robot and its controller but syptoms was same.
We cleared it.
Edge ring segment 300mm Helios
1011151 4ea, 1011152 2ea – 1set
IR lamps are on stock(10pcs only). 11100077.
We can also provide second source lamp.
This IO board is for mattson RTP system.
This board is for IPC in ast2800,2900
This board is for MMC in Helios
Mattson part number : 17002041
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Used Ripple pyrometer for ast2900,3000
Pyrometer Ripple wafer : 17000531
Pyrometer Ripple lamp : 17000532
These pyrometer for mattson ast2900, ast3000 and ripple upgraded 2800 system.
We provide professional service and support for Mattson Steag RTP systems.
Please e-mail us for more information.
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Cleared booting issue on MVME162P-244LE.
Signal tower and cassette station don't work due to IONET faulty.
The OS of MVME is vxWorks
We have trained customer on their tool ast3000 RTP system.
Each tools were customized to the company.
OEM offers training on standard system only.
No have chance such as SMIF, RR711, PMC 5V and so on..
Repair and upgrade mattson steag rtp ast2800 IPC
Res number : 170 00 366.07
Ser number : C8 0219.0063
This version has only one digital IO board.