| Rorze Model | RR713 | Inbound date | 04.Jul.2022 |
| Robot S/N | RC00189 | Controller S/N | N/A |
We overhauled RR713 robot for mattson 2900 RTP System.
Visit you tube link, you can see robot initialize, pick up and place.
Category: NEWS
Comaprison for foot print dimension ( Mattson RTP 200mm RTP )
Foot print of Mattson 3000 RTP is bigger than other 200mm RTP( mattson 2800, mattson 2900). But you can use your fab more efficiently with 3000 RTP system. Please see below photo.
Comaprison for foor print dimension ( Mattson RTP 200mm RTP )
Mattson 3000 handling configuration
Mattson / Steag / AST 3000(Plus) RTP production system
For 200mm / 300mm wafer size
For 180nm, 130nm, and sub-100 nm technology
Mattson Steag AST 3000 & 3000 Plus System.
This is base handling module.
The below photo shows 4 different types of available handler modules.
Most end user wants to find 200mm RTP system. But it is very difficult to find operational mattson steag ast 2800 or mattson steag ast 2900 system. Mattson steag AST3000 RTP designed for both 200mm and 300mm wafer. You can find used 300mm 3000 system in the surplus market and convert it to 200mm for your production.
RTP logos
Are you familiar with above logos?
Does your system have those logos on it?
You visited correct website.
You have RTP systems in your fab.
Steag / mattson / ast 2800
Steag / mattson /ast 2900
Steag / mattson /ast 3000
Mattson Helios with 3 FOUPs
If you are suffer from tool down, we can response you technically.
We are providing technical on site support, start up, Maintenance,modification, repair and parts worldwide.
We hope you might like below linked page.