Mattson Steag RTP 300mm (Helios, AST3000)

Refurbish and Relocation RTP Systems

  • 300mm RTP systems : AST3000(SHS3000) Plus, Helios, ATMOS, Helios XP
  • Down sizing service on AST3000(SHS3000) : 300mm to 200mm


We provide professional service and support for Mattson RTP systems. 

Please e-mail us for more information.

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