AST3000, Helios | 300mm RTP Systems

300mm(12inch) mattson RTP system

  • AST3000 (SHS3000, Mattson3000)
    • Advanced single-wafer, single chamber RTP system for 300mm and 200mm applications
    • Dual side heating with linear halogen lamps
  • Mattson Helios
    • Dual chamber configuration, Dual side heating with linear halogen lamps