Category Archives: Refurbish & Relocation

ast2800,2900,3000,Helios,3000steam,ATMOS,AZ8108,8800

Refurbishment and modification AST3000 RTP(SHS3000)

We provide refurbishment and midification on AST3000 RTP(SHS3000 RTP).

The original system was used in 300mm FAB and the end user wants to use it as a standard 200mm system. Therefore we downsize and upgrade some optiongs.

For example,

300mm 2 Foup system -> 200mm SMIF system

Install new sequencer(3001474_B, MES 1.19.1)

Remove External UPS option, External HDD

Replace water flow sensors, lamps and pyrometers.

Modification gas box to match end user's configuration.

Modification on EILC and ripple rack.

Therefore end user are using this system for 200mm

 

Mattson RTP ast2900 Refurbish and set-up

Refurbish Mattson RTP ast2900 system and installed it at SEC

Robot full overhauled Rorze RR711 with dual arm

Aligner full overhauled PRI

IPC Upgrade 17000366.09 – Pentium4 2.8Ghz Ram 1Gbyte SCSI 73Gbyte 15,000RPM

EPC486 Harddisk for ILC and Ripple were reinstalled.

Process set-up Completed.

Mattson RTP AST2900 Serial number : 2001050773

We provide professional service and support for Mattson RTP systems. 

Please e-mail us for more information.

sammy_lee@rtps.kr

Rotation error

Serviced rotation error for Mattson RTP ast3000(200mm) which is using for spike anneal at SEC.

Rotation didn't make home position with serveral reason.

We solved problem and the system works well for production.

We provide professional service and support for Mattson RTP systems. 

Please e-mail us for more information.

sammy_lee@rtps.kr