Category Archives: 200mm

200mm, 8inch RTP system 2800,2900,3000, 8108,8800

Mattson RTP ast2900 Refurbish and set-up

Refurbish Mattson RTP ast2900 system and installed it at SEC

Robot full overhauled Rorze RR711 with dual arm

Aligner full overhauled PRI

IPC Upgrade 17000366.09 – Pentium4 2.8Ghz Ram 1Gbyte SCSI 73Gbyte 15,000RPM

EPC486 Harddisk for ILC and Ripple were reinstalled.

Process set-up Completed.

Mattson RTP AST2900 Serial number : 2001050773

We provide professional service and support for Mattson RTP systems. 

Please e-mail us for more information.

sammy_lee@rtps.kr

Rotation error

Serviced rotation error for Mattson RTP ast3000(200mm) which is using for spike anneal at SEC.

Rotation didn't make home position with serveral reason.

We solved problem and the system works well for production.

We provide professional service and support for Mattson RTP systems. 

Please e-mail us for more information.

sammy_lee@rtps.kr