Pyrometer

Pyrometer repair service

  • The part number is 17000164
  • AST2800 system uses this pyrometer with Hot liner technology.
  • Some wafer manufacturing company doesn’t use Hot liner technology for high temperature
  • AST2900, AST3000 and upgrade ripple pyro 2800 system use below pyrometer.
  • 17000531 : Ripple pyrometer Wafer
  • 17000532 : Ripple pyrometer lamp

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