AST2900, AST3000 |200mm RTP Systems

AST-2900, AST-3000
Mattson 200mm RTP system

Mattson RTP system on different wafer size

150mm systems

  • Mattson 2800( AST2800 SHS2800 )
  • Mattson 2900 ( AST2900 SHS2900 )

200mm systems

We provide technical support such as refurbish, relocation, installation, trouble shooting and part repair.

Do you want repair service of 200mm RTP system. For more detail, Click below linked page.

Rorze robot overhaul

Pyrometer overhaul