Mattson RTP system on different wafer size
150mm systems
- Mattson 2800 ( AST2800 SHS2800 )
- Mattson 2900 ( AST2900 SHS2900 )
200mm systems
- Mattson 2800( AST2800 SHS2800 )
- Mattson 2900 ( AST2900 SHS2900 )
- Mattson 3000 ( AST3000 SHS3000 )
- AG8108, AG8800
We provide technical support such as refurbish, relocation, installation, trouble shooting and part repair.
Do you want repair service of 200mm RTP system. For more detail, Click below linked page.