We provide PMC Repair service. PMC stands for Process Module controller. In other words, we called it VME at the early model. This is only used for AST3000 system.
The Process Module Controller (PMC) uses a VX-Works realtime operating system
to control all recipe related functions including lamp control, gas flow control, wafer
rotation, and chamber door operation.
This part is very expensive and obsoleted.
Part numbers are as below.
17000550 : Sparc 5V
17000908 : Power PC V01
17000969 : Power PC V01
17002062 : MC PPC