We provide PMC Repair service. PMC stands for Process Module Controller, which was known as VME previously. This is only used for AST3000 system.
The Process Module Controller (PMC) uses a VX-Works realtime operating system to control all recipe related functions including lamp control, gas flow control, wafer rotation, and chamber door operation.
This part is very expensive and obsoleted.
Part numbers are as below.
Sparc 5V : 17000550
Power PC V01 : 17000908
Power PC V01 : 17000969
MC PPC : 17002062