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Pyrometer repair service

• The part number is 17000164

• AST2800 system uses this pyrometer with Hot liner technology.

• Some wafer manufacturing company doesn’t use Hot liner technology for high temperature

• AST2900, AST3000 and upgrade ripple pyro 2800 system use below pyrometer.

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• 17000531 : Ripple pyrometer Wafer

• 17000532 : Ripple pyrometer lamp