Sequencer

Repair service for sequencer which is used on Mattson3000 and Helios system.

The sequencer is the primary controlling computer of the 3000
system. This computer, which uses a SUN operating system (OS),
incorporates all GUI functions, including recipe creation and selection and
manual system operation. The sequencer also schedules all automatic wafer
processing operations and directly controls the robot and aligner during
normal operation.

The part number is as below.

17000600

17001027

17002560