Pyrometer Repair service (RTP pyrometer)
Part number :17000164 (Pyrometer In As-Detector)
This part is used in AST2800 RTP system.
The fail symptoms are as below.
1.Fail to read temperature
2. Unstable temperature control.
In conclusion, we cleared all faulty syptoms over 70 units..
This part used in mattson steag rtp 2800 system.
After replace pyrometer, you must perform TC calibration for correct temperature.
Repair time is 2 weeks.ans the warranty is 6 months.