AST2800 Pyrometer Repair service (RTP pyrometer)
Part number :17000164 (Pyrometer In As-Detector)
Most of symptoms are fail to read temperature or unstable temperature control.
We clear all faulty syptoms.
This part used in mattson steag rtp 2800 system.
After replace pyrometer, you must perform TC calibration for correct temperature.
Repair time is 2 weeks.