We have a stock of Mattson 3000 RTP System.
It is very hard to find Mattson 2800, Mattson 2900 system any more.
Here are 3000 system advantages
- Advanced single-wafer, single chamber RTP system for 300mm and 200mm applications
- Dual side wafer heating for excellent process results on the wafer
- Superior temperature uniformity through:
- —Chamber design using linear lamp arrays
- —Wafer rotation
- —Wafer edge guard ring on same level as the wafer
- Precise control of thermal budget of rapid thermal process by sophisticated temperature control
- Atmospheric pressure process chamber
- True bridge tool capability from 200mm to 300mm
- Excellent Cost of Ownership
- Long life-time lamps