Slip guard ring for mattson steag rtp system

Edge guard ring(Slip Guard ring) for shs2900, shs3000(200mm)

Edge guard ring(Slip Guard ring) for shs2900, shs3000(200mm)

Part number : 47800116

Edge guard ring(Slip Guard ring) for shs2900, shs3000(200mm)

6 pieces are 1 set.


Complete to manufacture and get qualification as a 2nd source.

We also provide edge ring for shs2800 system.

 

We provide professional service and support for Mattson RTP systems. 

Please e-mail us for more information.

sammy_lee@rtps.kr