Tag Archives: ast3000

Refurbishment and modification AST3000 RTP(SHS3000)

We provide refurbishment and midification on AST3000 RTP(SHS3000 RTP).

The original system was used in 300mm FAB and the end user wants to use it as a standard 200mm system. Therefore we downsize and upgrade some optiongs.

For example,

300mm 2 Foup system -> 200mm SMIF system

Install new sequencer(3001474_B, MES 1.19.1)

Remove External UPS option, External HDD

Replace water flow sensors, lamps and pyrometers.

Modification gas box to match end user's configuration.

Modification on EILC and ripple rack.

Therefore end user are using this system for 200mm

 

Rotation error

Serviced rotation error for Mattson RTP ast3000(200mm) which is using for spike anneal at SEC.

Rotation didn't make home position with serveral reason.

We solved problem and the system works well for production.

We provide professional service and support for Mattson RTP systems. 

Please e-mail us for more information.

sammy_lee@rtps.kr

Repair robot and aligner

Repair PRI and Rorze robot and aligner

Rorze Robot RR713,RR711,RR701 – AST2900, AST3000

Rorze Robot RR717 – Helios, ATMOS, Helios XP

PRI (Brooks) Alinger – AST2800, AST2900, and AST3000

PRI Brooks(Equipe) Robot – AST2800


Alinger

Repair Aligner

We repair aligner and rorze robot for RTP systems.

We provide professional service and support for Mattson RTP systems. 

Please e-mail us for more information.

sammy_lee@rtps.kr

RR713 – Repair & Refurbish Service

RR71Rorze Robot

We provide full refurbish service.

This robot is used in mattson RTP AST2900 and AST3000.

If you are interested in repair rorze RR713 robot, please e-mail us for more information.

Rorze

We provide professional service and support for Mattson RTP systems. 

Please e-mail us for more information.

sammy_lee@rtps.kr