Refurbish Mattson RTP ast2900 system and installed it at SEC
Robot full overhauled Rorze RR711 with dual arm
Aligner full overhauled PRI
IPC Upgrade 17000366.09 – Pentium4 2.8Ghz Ram 1Gbyte SCSI 73Gbyte 15,000RPM
EPC486 Harddisk for ILC and Ripple were reinstalled.
Process set-up Completed.
Mattson RTP AST2900 Serial number : 2001050773