Tag Archives: rotation error

Rotation error

Serviced rotation error for Mattson RTP ast3000(200mm) which is using for spike anneal at SEC.

Rotation didn't make home position with serveral reason.

We solved problem and the system works well for production.

We provide professional service and support for Mattson RTP systems. 

Please e-mail us for more information.

sammy_lee@rtps.kr