Foot print of Mattson 3000 RTP is bigger than other 200mm RTP( mattson 2800, mattson 2900). But you can use your fab more efficiently with 3000 RTP system. Please see below photo.
Comaprison for foor print dimension ( Mattson RTP 200mm RTP )
Comaprison for foot print dimension ( Mattson RTP 200mm RTP )