Mattson / Steag / AST 3000(Plus) RTP production system
For 200mm / 300mm wafer size
For 180nm, 130nm, and sub-100 nm technology
Mattson Steag AST 3000 & 3000 Plus System.
This is base handling module.
The below photo shows 4 different types of available handler modules.
Most end user wants to find 200mm RTP system. But it is very difficult to find operational mattson steag ast 2800 or mattson steag ast 2900 system. Mattson steag AST3000 RTP designed for both 200mm and 300mm wafer. You can find used 300mm 3000 system in the surplus market and convert it to 200mm for your production.