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Mattson Helios RTP

Mattson Helios RTP
Mattson Helios RTP
  • Dual side heating with linear halogen lamps
         –  Reduced stress minimized pattern effects
         –  Higher total power density for flash anneal capabilities    
  • Non-contact edge guard ring, along with sharp quartz
         pins ensure better inherent uniformity and zero slip line
  • Field proven RippleTM pyrometry
         –  Reliable and repeatable process results
         –  Emissivity compensation
         –  High tolerance to deposits on chamber quartzware
  • Dual Chamber Configuration, Single Atmospheric Front End
    • identical and independent process modules for 300mm wafer size
    • Single atmospheric, linear handler serving 3 FOUP loadports
    • Faster dual arm robot
    • Central cooling station including slots for dummy wafers
  • Dynamic uniformity control and novel temperature controller  for improved transient temperature uniformity and ease of use

RTP logos


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Does your system have those logos on it?

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You have RTP systems such as mattson Helios, Mattson 3000, AST2800 and AST2900.

If you are suffer from tool down, we can response you technically.

We are providing technical on site support, start up, Maintenance, repair and parts worldwide.

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Rorze robot overhaul

Pyrometer overhaul