Category Archives: News

News

SECS GEM communication

We set up SECS GEM communication on shs2800 system.

It was 6inch fab and they didn't use FA before.

Their OS and SHSp versions are lots of kind such as 1.6.0, 1.1.4, 1.0.1 and DOS.

We upgraded SW  version and made system use SEC GEM communication.

Slip guard ring for mattson steag rtp system

Edge guard ring(Slip Guard ring) for shs2900, shs3000(200mm)

Edge guard ring(Slip Guard ring) for shs2900, shs3000(200mm)

Part number : 47800116

Edge guard ring(Slip Guard ring) for shs2900, shs3000(200mm)

6 pieces are 1 set.


Complete to manufacture and get qualification as a 2nd source.

We also provide edge ring for shs2800 system.

 

We provide professional service and support for Mattson RTP systems. 

Please e-mail us for more information.

sammy_lee@rtps.kr

Wafer aligner for AG RTP system

AG_aligner_BODY

 

We provide repair sevice for wafer aligner on AG8108, AG8800

Part number : 4900-0006-25   AG ASSOCIATES

Model Number : 001-0080-10   Brooks Automation

We provide professional service and support for Mattson RTP systems. 

Please e-mail us for more information.

sammy_lee@rtps.kr

SHS2800 Pyrometer

SHS2800 Pyrometer Repair service

Part number :17000164

Most of symptoms are fail to read temperature or unstable temperature control.

We cleared all faulty syptoms.

This part used in mattson steag rtp 2800 system. 

After replace pyrometer, you must perform TC calibration for correct temperature.

Repair time is 2 weeks in Korea.

We provide professional service and support for Mattson RTP systems. 

Please e-mail us for more information.

sammy_lee@rtps.kr

Refurbishment and modification AST3000 RTP(SHS3000)

We provide refurbishment and midification on AST3000 RTP(SHS3000 RTP).

The original system was used in 300mm FAB and the end user wants to use it as a standard 200mm system. Therefore we downsize and upgrade some optiongs.

For example,

300mm 2 Foup system -> 200mm SMIF system

Install new sequencer(3001474_B, MES 1.19.1)

Remove External UPS option, External HDD

Replace water flow sensors, lamps and pyrometers.

Modification gas box to match end user's configuration.

Modification on EILC and ripple rack.

Therefore end user are using this system for 200mm

 

Clear rorze robot problem in ast3000

We cleared rorze robot problem in ast3000.

Rorze robot connected Com2 on sequencer with RS232.

End user tried to initialize rorze robot but fail. They replaced rorze robot and its controller but syptoms was same.

We cleared it.

RR713

RR713